等离子体渗氮对钛合金表面镀渗Ti-N复合改性层组织性能的影响

doi:10.13251/j.issn.0254-6051.2025.03.044

金属热处理 ›› 2025, Vol. 50 ›› Issue (3): 277-283.DOI: 10.13251/j.issn.0254-6051.2025.03.044

等离子体渗氮对钛合金表面镀渗Ti-N复合改性层组织性能的影响

李月琛¹, 顾晋¹, 张林^1,3, 谢焕钧², 郑军¹, 袁静³

1.安徽工业大学先进金属材料绿色制备与表面技术教育部重点实验室, 安徽马鞍山 243002;
2.中国航发中传机械有限公司, 湖南长沙 410200;
3.安徽航睿电子科技有限公司, 安徽铜陵 244000

收稿日期:2024-10-12 修回日期:2025-01-24 出版日期:2025-03-25 发布日期:2025-05-14
通讯作者: 张林,副教授,博士,E-mail:zhanglin_dut@163.com
作者简介:李月琛(1998—),男,硕士研究生,主要研究方向为金属表面强化,E-mail:13592344043@163.com。
基金资助:
国家重点研发计划(2023YFB3812700);安徽省高等学校科学研究项目(2022AH050300);芜湖市科技计划项目(2021hg11);安徽省博士后科研项目(2024C901);冶金工程与资源综合利用安徽省重点实验室开放基金(SKF21-01)

Effect of plasma nitriding on microstructure and properties of plated-nitrided Ti-N layer on titanium alloy

Li Yuechen¹, Gu Jin¹, Zhang Lin^1,3, Xie Huanjun², Zheng Jun¹, Yuan Jing³

1. Key Laboratory of Green Fabrication and Surface Technology of Advanced Metal Materials, Ministry of Education, Anhui University of Technology, Maanshan Anhui 243002, China;
2. AECC Zhongchuan Transmission Machinery Co., Ltd., Changsha Hunan 410200, China;
3. Anhui HERO Electronic Sci & Tec Co., Ltd., Tongling Anhui 244000, China

Received:2024-10-12 Revised:2025-01-24 Online:2025-03-25 Published:2025-05-14

摘要/Abstract

摘要： 通过在钛合金TC21表面磁控溅射金属Ti薄膜,然后在580 ℃下对预制Ti膜的钛合金进行等离子体渗氮处理,在钛合金表面制备了镀渗Ti-N复合改性,研究离子渗氮过程中不同氮氢比对镀渗复合改性层结构与性能的影响。结果表明,预镀Ti金属膜促进了氮原子的有效扩散与反应,实现了钛合金表面低温等离子体镀渗复合强化。钛合金表面镀渗Ti-N复合改性层主要由ε-Ti₂N、TiN和α-Ti相组成,随着氮氢比增加,脆性相ε-Ti₂N相对含量降低,复合改性层的结合强度明显改善。经镀渗复合改性处理,钛合金表面的硬度和耐磨性能得到显著提升,氮氢比为3∶1时,镀渗层硬度最高为725 HK0.05。

关键词: 钛合金, 等离子体渗氮, 镀渗Ti-N层, 组织, 硬度, 耐磨性

Abstract: By magnetron sputtering metal Ti thin film on the TC21 titanium alloy surface, and then the alloy with pre-fabricated Ti film was plasma nitrided at 580 ℃, the plated-nitrided Ti-N layer on the TC21 titanium alloy surface was prepared, and the effects of different N₂/H₂ ratios during the plasma nitriding process on the structure and properties of the plated-nitrided Ti-N layer were studied. The results indicate that the pre-deposited Ti metal film promotes the effective diffusion and reaction of nitrogen atoms, achieving low-temperature plasma plating-and-nitriding composite strengthening on the surface of the titanium alloy. The plated-nitrided Ti-N layer is mainly consisted of ε-Ti₂N, TiN and ɑ-Ti phases, and the relative content of brittle phase ε-Ti₂N decreases with the increase of N₂/H₂ ratio, resulting in the improvement of adhesion strength. The microhardness and wear resistance of the titanium alloy are significantly enhanced by the plating-and-nitriding composite strengthening. When the N₂/H₂ ratio is 3∶1, the hardness of the plated-nitrided Ti-N layer reaches a maximum of 725 HK0.05.

Key words: titanium alloy, plasma nitriding, plated-nitrided Ti-N layer, microstructure, hardness, wear resistance

中图分类号:

TG156.8

李月琛, 顾晋, 张林, 谢焕钧, 郑军, 袁静. 等离子体渗氮对钛合金表面镀渗Ti-N复合改性层组织性能的影响[J]. 金属热处理, 2025, 50(3): 277-283.

Li Yuechen, Gu Jin, Zhang Lin, Xie Huanjun, Zheng Jun, Yuan Jing. Effect of plasma nitriding on microstructure and properties of plated-nitrided Ti-N layer on titanium alloy[J]. Heat Treatment of Metals, 2025, 50(3): 277-283.

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等离子体渗氮对钛合金表面镀渗Ti-N复合改性层组织性能的影响

Effect of plasma nitriding on microstructure and properties of plated-nitrided Ti-N layer on titanium alloy

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