偏压对HiPIMS制备DLC薄膜结构与性能的影响

doi:10.13251/j.issn.0254-6051.2025.05.035

摘要/Abstract

摘要： 采用高功率脉冲磁控溅射(HiPIMS)技术,在硬质合金YG8基体表面沉积TiAlSiN过渡层,并在0~-300 V的偏压下制备了类金刚石(DLC)薄膜。利用Raman光谱、XPS、SEM表征薄膜的组织结构与微观形貌,采用纳米压痕、划痕法、摩擦磨损试验研究薄膜的力学性能。结果表明,随着负偏压的增加,DLC薄膜的I_D/I_G值先减小后增大,G峰半高宽先增大后减小,-200 V制备的薄膜I_D/I_G值最小、G峰半高宽最大,sp³键含量最高,达到58.0%。不同偏压下DLC薄膜的截面形貌均无明显柱状结构,特别是偏压为-200 V与-300 V时,薄膜呈现致密的类玻璃态结构。不同偏压下薄膜的硬度(H)、相对弹性模量(E^*)、H/E^*、H³/E^*2与sp³含量变化趋势基本一致,偏压为-200 V时,薄膜的综合力学性能最佳,硬度与相对弹性模量分别为23.91 GPa与260.45 GPa,H/E^*与H³/E^*2分别为0.0918与0.2016 GPa。不同偏压下DLC薄膜的划痕形貌表明,-100 V与-200 V制备的DLC薄膜表现出优异的结合强度,临界载荷L_c2≥80 N。摩擦试验表明,DLC薄膜具有优异的摩擦学性能。特别是-200 V下沉积的DLC薄膜具有最低的平均摩擦因数与最低的磨损率,分别为0.09与5.75×10^-1⁶ m³/(N·m)。

关键词: 高功率脉冲磁控溅射(HiPIMS), 类金刚石薄膜, 基体偏压, 组织结构, 力学性能

Abstract: Diamond-like carbon (DLC) film was deposited via high power impulse magnetron sputtering (HiPIMS) technology at bias voltage range between 0 to -300 V. The microstructure of the film was characterized by using Raman spectroscopy, X-ray photoelectron spectroscopy (XPS) and scanning electron microscope (SEM). The mechanical properties of the film were investigated through the utilization of nanoindentation, scratch and friction and wear tests. The results demonstrate that with the increase of negative bias voltage, the I_D/I_G value of DLC film initially decreases and then increases, the full width at half maximum of G peak(FWHM(G)) initially increases and then decreases, and the I_D/I_G value of the film prepared with bias voltage of -200 V is the smallest, the FWHM(G) is the largest, and the sp³ bond content is the highest, reaching 58.0%. The section morphology of the DLC film at different bias voltages exhibits no discernible columnar structure, particularly at bias voltages of -200 V or -300 V, where the film displays a dense glass-like structure. The hardness (H), relative elastic modulus (E^*), H/E^*, H³/E^*2 and sp³ contents of the film under different bias voltage are essentially comparable, at bias voltage of -200 V, the film exhibits the optimal comprehensive mechanical properties, with hardness and relative elastic modulus of 23.91 GPa and 260.45 GPa, respectively. The values of H/E^* and H³/E^*2 are 0.0918 and 0.2016 GPa, respectively. The scratch morphologies of the DLC films at different bias voltages demonstrate that films prepared with -100 V and -200 V exhibit excellent adhension strength, with a critical load (L_c2) of at least 80 N. Additionally, the friction tests indicate that the DLC films possess excellent tribological properties. In particular, the film deposited at -200 V exhibits the lowest average friction coefficient(0.09) and the lowest wear rate (5.75×10^-1⁶ m³/(N·m)).

Key words: high power impulse magnetron sputtering (HiPIMS), diamond-like carbon film, substrate bias voltage, microstructure, mechanical properties

中图分类号:

TG174.4

吴勇, 刘书洋, 陈辉, 陶冠羽, 杜建融, 张钰. 偏压对HiPIMS制备DLC薄膜结构与性能的影响[J]. 金属热处理, 2025, 50(5): 228-235.

Wu Yong, Liu Shuyang, Chen Hui, Tao Guanyu, Du Jianrong, Zhang Yu. Effect of bias voltage on structure and properties of DLC film prepared by HiPIMS[J]. Heat Treatment of Metals, 2025, 50(5): 228-235.

参考文献

[1] Martins P S, Almeida Magalhães Júnior P A, Gonçalves Carneiro J R, et al. Study of diamond-like carbon coating application on carbide substrate for cutting tools used in the drilling process of an Al-Si alloy at high cutting speeds[J]. Wear, 2022, 498-499(1): 204326.
[2] Sateesh Kumar C, Majumder H, Khan A, et al. Applicability of DLC and WC/C low friction coatings on Al₂O₃/TiCN mixed ceramic cutting tools for dry machining of hardened 52100 steel[J]. Ceramics International, 2020, 46(8): 11889-11897.
[3] 张而耕, 陈强. 类金刚石涂层的研究进展及其应用[J]. 粉末冶金工业, 2015, 25(5): 60-65.
Zhang Ergeng, Chen Qiang. Research progress and application of diamond-like carbon coating[J]. Powder Metallurgy Industry, 2015, 25(5): 60-65.
[4] Yang L, Chen Y, Xu Z, et al. Effect of heat treatment on mechanical property of amorphous carbon films by magnetron sputtering[J]. Diamond and Related Materials, 2022, 129(9): 109328.
[5] Anders A. A review comparing cathodic arcs and high power impulse magnetron sputtering (HiPIMS)[J]. Surface and Coatings Technology, 2014, 257(20): 308-325.
[6] Sarakinos K, Alami J, Konstantinidis S. High power pulsed magnetron sputtering: A review on scientific and engineering state of the art[J]. Surface and Coatings Technology, 2010, 204(11): 1661-1684.
[7] Lomon J, Chaiyabin P, Songsiriritthigul P, et al. Diamond-like carbon films prepared by high power impulse magnetron sputtering[J]. Materials Today: Proceedings, 2019, 17(12): 1549-1554.
[8] 韩明月, 李刘合, 李花, 等. 高功率脉冲磁控溅射(HiPIMS)等离子体放电时空特性研究进展[J]. 表面技术, 2019, 48(9): 20-52.
Han Mingyue, Li Liuhe, Li Hua, et al. Temporal/spatial characteristics of plasma discharge by high power impulse magnetron sputtering (HiPIMS)[J]. Surface Technology, 2019, 48(9): 20-52.
[9] Kumar P, Gupta M, Deshpande U P, et al. Density and microstructure of a-C thin films[J]. Diamond and Related Materials, 2018, 84: 71-76.
[10] Sarakinos K, Braun A, Zilkens C, et al. Exploring the potential of high power impulse magnetron sputtering for growth of diamond-like carbon films[J]. Surface and Coatings Technology, 2012, 206(10): 2706-2710.
[11] Wang L, Liu Y, Chen H, et al. Modification methods of diamond like carbon coating and the performance in machining applications: A review[J]. Coatings, 2022, 12(2): 224-254.
[12] 彭雅利, 郭朝乾, 林松盛, 等. 综述金属掺杂对类金刚石薄膜结构和性能的影响[J]. 电镀与涂饰, 2019, 38(15): 826-832.
Peng Yali, Guo Chaoqian, Lin Songsheng, et al. Effect of metal doping on structure and properties of diamond-like carbon films: A review[J]. Electroplating and Finishing, 2019, 38(15): 826-832.
[13] Yang L, Chen Y, Xu Z, et al. Effect of heat treatment on mechanical property of amorphous carbon films by magnetron sputtering[J]. Diamond and Related Materials, 2022, 129(9): 109328.
[14] Chang C L, Wang D Y. Microstructure and adhesion characteristics of diamond-like carbon films deposited on steel substrates[J]. Diamond and Related Materials, 2001, 10(1): 1528-1534.
[15] Costa R P C, Lima-oliveira D A, Marciano F R, et al. Comparative study of the tribological behavior under hybrid lubrication of diamond-like carbon films with different adhesion interfaces[J]. Applied Surface Science, 2013, 285(22): 645-648.
[16] Wang K, Zhou H, Zhang K, et al. Effects of interlayer bias voltage on the mechanical properties of tetrahedral amorphous carbon films[J]. Vacuum, 2022, 206(12): 111555.
[17] 王永坤, 秦洪, 杨静, 等. 含氢类金刚石涂层在船用柴油机柱塞上的应用[J]. 金属热处理, 2020, 45(11): 226-231.
Wang Yongkun, Qin Hong, Yang Jing, et al. Applicant of hydrogenated diamond like coating on plunger for marine diesel engine[J]. Heat Treatment of Metals, 2020, 45(11): 226-231.
[18] 许世鹏, 李晓伟, 陈仁德, 等. 膜厚对超薄四面体非晶碳膜应力和结构的影响[J]. 硅酸盐学报, 2019, 47(1): 71-76.
Xu Shipeng, Li Xiaowei, Chen Rende, et al. Thickness dependence of stress and microstructure in ultrathin tetrahedral amorphous carbon films[J]. Journal of the Chinese Ceramic Society, 2019, 47(1): 71-76.
[19] Robertson J. Diamond-like amorphous carbon[J]. Materials Science and Engineering R Report: A Review Journal, 2002, 37(4-6): 129-281.
[20] 冯兴国, 周晖, 张延帅, 等. 氩气流量对非晶碳膜结构及力学和摩擦学性能的影响[J]. 表面技术, 2021, 50(10): 263-269.
Feng Xingguo, Zhou Hui, Zhang Yanshuai, et al. Effects of argon flow on structure, mechanical and tribological properties of amorphous carbon films[J]. Surface Technology, 2021, 50(10): 263-269.
[21] 杜建融, 陶冠羽, 陈辉, 等. 偏压对HiPIMS制备TiAlSiN涂层结构与性能的影响[J]. 材料保护, 2024, 57(7): 30-42.
Du Jianrong, Tao Guanyu, Chen Hui, et al. Influence of bias voltage on microstructure and properties of TiAlSiN coatings prepared by HiPIMS[J]. Materials Protection, 2024, 57(7): 30-42.
[22] Chen Y, Su F, Li H, et al. Hydrogen-free DLC films fabricated using superimposed HiPIMS-DCMS deposition system: Bias voltage effects[J]. Surface and Coatings Technology, 2023, 470(19): 129820.
[23] Ohtake N, Hiratsuka M, Kanda K, et al. Properties and classification of diamond-like carbon films[J]. Materials(Basel), 2021, 14(2): 315.
[24] 刘孟奇, 王建强, 王宇. 不同掺杂设计对类金刚石涂层海水环境摩擦学性能的影响[J]. 金属热处理, 2020, 45(3): 186-190.
Liu Mengqi, Wang Jianqiang, Wang Yu. Effect of doping design on tribological performances of DLC coating in seawater[J]. Heat Treatment of Metals, 2020, 45(3): 186-190.
[25] 杜建融, 陶冠羽, 曾路, 等. TiAlSiN纳米复合涂层的研究进展[J]. 表面技术, 2024, 53(18): 31-54.
Du Jianrong, Tao Guanyu, Zeng Lu, et al. Research progress on TiAlSiN nanocomposite coatings[J]. Surface Technology, 2024, 53(18): 31-54.
[26] Yin Z, Wu S, Zhang Y, et al. A comparative study on the structure and properties of TiAlSiN coatings deposited by FCVA and HiPIMS[J]. Journal of Alloys and Compounds, 2024, 1005: 175844.
[27] 李海潮, 苏峰华, 陈彦军, 等. 硅掺杂无氢非晶碳膜的HiPIMS/DCMS共沉积制备及其高温摩擦学性能[J]. 摩擦学学报, 2023, 43(4): 385-396.
Li Haichao, Su Fenghua, Chen Yanjun, et al. High temperature tribological properties of hydrogen-free Si-DLC films using HiPIMS/DCMS Co-deposition technique[J]. Tribology, 2023, 43(4): 385-396.