偏压对HiPIMS制备DLC薄膜结构与性能的影响
吴勇, 刘书洋, 陈辉, 陶冠羽, 杜建融, 张钰
Effect of bias voltage on structure and properties of DLC film prepared by HiPIMS
Wu Yong, Liu Shuyang, Chen Hui, Tao Guanyu, Du Jianrong, Zhang Yu
金属热处理
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2025, (5): 228
-235
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DOI: 10.13251/j.issn.0254-6051.2025.05.035