退火温度对冷轧气相沉积高纯钨再结晶行为的影响

doi:10.13251/j.issn.0254-6051.2021.03.007

金属热处理 ›› 2021, Vol. 46 ›› Issue (3): 33-38.DOI: 10.13251/j.issn.0254-6051.2021.03.007

退火温度对冷轧气相沉积高纯钨再结晶行为的影响

檀校^1,2, 郝玉朋², 于晓东², 王玉天¹, 谭成文², 胡劲¹

1.昆明理工大学材料科学与工程学院, 云南昆明 650093;
2.北京理工大学材料学院, 北京 100081

收稿日期:2020-11-19 出版日期:2021-03-25 发布日期:2021-05-08
通讯作者: 胡劲,教授,博士,E-mail:894559377@qq.com
作者简介:檀校(1994—),男,硕士研究生,主要研究方向为稀贵金属材料的制备,E-mail:tanxiao112113@163.com。

Effect of annealing temperature on recrystallization behaviors of cold-rolled high-purity CVD tungsten

Tan Xiao^1,2, Hao Yupeng², Yu Xiaodong², Wang Yutian¹, Tan Chengwen², Hu Jin¹

1. School of Materials Science and Engineering, Kunming University of Science and Technology, Kunming Yunnan 650093, China;
2. School of Materials Science and Engineering, Beijing Institute of Technology, Beijing 100081, China

Received:2020-11-19 Online:2021-03-25 Published:2021-05-08

摘要/Abstract

摘要： 通过不同温度的退火试验研究了化学气相沉积高纯钨冷轧后的再结晶行为。结果表明,冷轧钨中形成层状异质结构,提高了材料的应变硬化率,进而提高了塑性,韧脆转变温度降低到200 ℃以下,硬度从沉积态的402 HV0.2提高到547 HV0.2。高温退火后,冷轧钨在1100 ℃发生再结晶,与沉积态钨相比,再结晶温度降低了880 ℃,这是由于低温塑性变形导致材料储存能升高,再结晶驱动力提高,再结晶温度降低。随着退火温度的升高,由于晶粒尺寸的增大,层状异质结构逐渐消失,硬度迅速降低到完全再结晶态的370 HV0.2,而屈服强度从冷轧态的1224 MPa逐渐降低到1800 ℃退火后的558 MPa,但韧脆转变温度仍保持在200 ℃以下。

关键词: 化学气相沉积, 冷轧钨, 再结晶, 韧脆转变温度

Abstract: Recrystallization behavior of chemical vapor deposited high purity tungsten after cold-rolling was studied by using annealing experiments at different temperatures. The results show that layered heterostructure is formed in the cold-rolled tungsten, which improves the strain hardening rate of the material, thereby improving the plasticity. After cold rolling, the ductile-brittle transition temperature is reduced to below 200 ℃, and the hardness is increased from 402 HV0.2 in deposited state to 547 HV0.2. After high temperature annealing, the cold-rolled tungsten recrystallizes at 1100 ℃, and the recrystallization temperature is reduced by 880 ℃ compared with the deposited tungsten. This is because the storage energy of the material is increased due to low-temperature plastic deformation, and the recrystallization driving force is increased, so the recrystallization temperature decreases. As the annealing temperature increases, the layered heterostructure gradually disappears due to the increase of grain size, the hardness rapidly decreases to 370 HV0.2 in the fully recrystallized state, and the yield strength gradually decreases from 1224 MPa in the cold-rolled state to 558 MPa after annealing at 1800 ℃, but the ductile-brittle transition temperature remains below 200 ℃.

Key words: chemical vapor deposition(CVD), cold-rolled tungsten, recrystallization, ductile-brittle transition temperature

中图分类号:

TG166.7

檀校, 郝玉朋, 于晓东, 王玉天, 谭成文, 胡劲. 退火温度对冷轧气相沉积高纯钨再结晶行为的影响[J]. 金属热处理, 2021, 46(3): 33-38.

Tan Xiao, Hao Yupeng, Yu Xiaodong, Wang Yutian, Tan Chengwen, Hu Jin. Effect of annealing temperature on recrystallization behaviors of cold-rolled high-purity CVD tungsten[J]. Heat Treatment of Metals, 2021, 46(3): 33-38.

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退火温度对冷轧气相沉积高纯钨再结晶行为的影响

Effect of annealing temperature on recrystallization behaviors of cold-rolled high-purity CVD tungsten

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