不同沉积温度下CrCN涂层的力学性能

doi:10.13251/j.issn.0254-6051.2022.04.041

金属热处理 ›› 2022, Vol. 47 ›› Issue (4): 240-244.DOI: 10.13251/j.issn.0254-6051.2022.04.041

不同沉积温度下CrCN涂层的力学性能

刘乃瑜, 曹磊, 郑少梅

青岛理工大学机械与汽车工程学院, 山东青岛 266033

收稿日期:2021-12-17 修回日期:2022-01-13 出版日期:2022-04-25 发布日期:2022-05-19
通讯作者: 郑少梅,副教授,博士,E-mail: zsm197637@126.com
作者简介:刘乃瑜(1996—),男,硕士研究生,主要研究方向为表面工程,E-mail: 1260906510@qq.com。

Mechanical properties of CrCN coatings at different deposition temperatures

Liu Naiyu, Cao Lei, Zheng Shaomei

School of Mechanical and Automotive Engineering, Qingdao University of Technology, Qingdao Shandong 266033, China

Received:2021-12-17 Revised:2022-01-13 Online:2022-04-25 Published:2022-05-19

摘要/Abstract

摘要： 使用磁控溅射技术在304不锈钢表面制备CrCN涂层,研究了沉积温度(200、250、300、350和400 ℃)对涂层结构及力学性能的影响。研究表明,沉积温度为250 ℃时,涂层的晶粒尺寸及表面粗糙度最大,但随着沉积温度的进一步升高,涂层的晶粒逐渐细化,表面粗糙度明显下降;同时涂层硬度伴随沉积温度的升高出现先增大后减少的趋势,沉积温度为350 ℃时,薄膜具有最高的硬度(22.85 GPa),抗弹性形变和抗塑性形变能力最好,体现出优异的力学性能。

关键词: 磁控溅射, CrCN涂层, 沉积温度, 力学性能

Abstract: CrCN coatings were prepared on 304 stainless steel surface by magnetron sputtering technique, then the effect of deposition temperature on structure and mechanical properties of the CrCN coating was studied. The results show that the grain size and surface roughness are the largest for the coating obtained at 250 ℃. With further increase of the deposition temperature, the grain size is gradually refined, and the surface roughness is gradually decreased, but the hardness shows a trend of increasing and then decreasing. The coating obtained at the deposition temperature of 350 ℃ presents the highest hardness and the best resistance to elastic deformation and plastic deformation, showing the excellent mechanical properties of the coating.

Key words: magnetron sputtering, CrCN coating, deposition temperature, mechanical properties

中图分类号:

TG148

刘乃瑜, 曹磊, 郑少梅. 不同沉积温度下CrCN涂层的力学性能[J]. 金属热处理, 2022, 47(4): 240-244.

Liu Naiyu, Cao Lei, Zheng Shaomei. Mechanical properties of CrCN coatings at different deposition temperatures[J]. Heat Treatment of Metals, 2022, 47(4): 240-244.

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不同沉积温度下CrCN涂层的力学性能

Mechanical properties of CrCN coatings at different deposition temperatures

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