Effect of carbon source concentration on microstructure and properties of diamond coating

doi:10.13251/j.issn.0254-6051.2025.05.049

Abstract

Abstract: Diamond coatings were prepared by the hot filament chemical vapor deposition (HFCVD) method using hydrogen(H₂) and methane (CH₄) as the gas sources. Scanning electron microscope (SEM), X-ray diffraction (XRD), and Raman spectroscopy were used to detect the morphology, structure, and composition of the coatings. The influence of the carbon source concentration on the coating quality was investigated, and the tribological properties of the diamond films under different carbon source concentrations were studied and compared. The results show that in the test of preparing diamond films in the H₂/CH₄ system, increasing the carbon source concentration can regulate the transformation of diamond grains from the micrometer scale to the nanometer scale. The doping of boron will cause the characteristic Raman peak of diamond to exhibit an asymmetric shape due to the Fano effect. Moreover, as the carbon source concentration increases, the content of non-diamond carbon in the diamond film increases, while the content of diamond carbon decreases. The results of the reciprocating friction test show that the friction coefficients of all the diamond films are significantly reduced, indicating that depositing diamond films on the surface of YG3/YG6 cemented carbide substrates can significantly improve the service performance of YG3/YG6 alloys in the field of tribology.

Key words: chemical vapor deposition, diamond coating, boron-doped diamond, carbon source concentration, tribological properties

CLC Number:

TQ163

Guo Yuyang, Wu Yong, Sun Qingyun, Chen Hui, Yang Fu, Xia Siyao. Effect of carbon source concentration on microstructure and properties of diamond coating[J]. Heat Treatment of Metals, 2025, 50(5): 314-321.

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