磁控溅射沉积W-Ti薄膜的结构与性能

磁控溅射沉积W-Ti薄膜的结构与性能

孙国琪，孙勇，郭中正，段永华

Structure and properties of W-Ti thin films deposited by magnetron sputtering

Sun Guoqi, Sun Yong, Guo Zhongzheng, Duan Yonghua

金属热处理 . 2016, (10): 90 -94 . DOI: 10.13251/j.issn.0254-6051.2016.10.020