磁控共溅射沉积Al-Al2O3复合膜的结构与性能
王凯亮1,2，孙勇1,2，郭中正1,2，段永华1,2，孙国琪1,2
Structures and properties of magnetron co-sputtering Al-Al2O3 composite films
Wang Kailiang1,2, Sun Yong1,2, Guo Zhongzheng1,2, Duan Yonghua1,2, Sun Guoqi1,2
金属热处理
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2016, (1): 184
-189
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DOI: 10.13251/j.issn.0254-6051.2016.01.039