氮气流量对(Ti,Al,Si,Cr)N超硬薄膜的结构与性能的影响

王芳，黄维刚，赵海波

Effect of nitrogen flow on microstructure and mechanical properties of (Ti, Al, Si, Cr)N superhard film

Wang fang, Huang Weigang, Zhao Haibo

金属热处理 . 2014, (2): 65 -68 .