固溶处理对半导体加工设备用6061铝合金阳极氧化性能的影响
莫灼强, 莫肇月, 任月路, 杨旭, 何杰, 雷浩成, 叶文韬
Effect of solution treatment on anodic oxidation property of 6061 aluminum alloy used in semiconductor processing equipment
Mo Zhuoqiang, Mo Zhaoyue, Ren Yuelu, Yang Xu, He Jie, Lei Haocheng, Ye Wentao
金属热处理
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2025, (8): 144
-149
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DOI: 10.13251/j.issn.0254-6051.2025.08.023