脉冲偏压占空比对TiSiN薄膜结构和性能的影响

魏永强, 顾艳阳, 赵重轻, 蒋志强

Effect of pulsed bias duty ratio on structure and properties of TiSiN film

Wei Yongqiang, Gu Yanyang, Zhao Zhongqing, Jiang Zhiqiang

金属热处理 . 2022, (8): 279 -286 . DOI: 10.13251/j.issn.0254-6051.2022.08.046