脉冲偏压频率对TiSiN薄膜的微观结构和性能的影响

魏永强, 宋如蕃, 蒋志强

Effect of pulsed bias frequency on microstructure and properties of TiSiN film

Wei Yongqiang, Song Rufan, Jiang Zhiqiang

金属热处理 . 2021, (11): 213 -219 . DOI: 10.13251/j.issn.0254-6051.2021.11.038