退火温度对磁控溅射TiN/TiCN薄膜残余应力、结构及耐蚀性能的影响
云璐, 郝新
Effect of annealing temperature on residual stress, structure and corrosion resistance of magnetron sputtering TiN/TiCN film
Yun Lu, Hao Xin
金属热处理
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2021, (5): 166
-170
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DOI: 10.13251/j.issn.0254-6051.2021.05.027