不同气体流量比对Cu/a-C∶H复合薄膜结构及摩擦学性能的影响
孟杰, 田林海, 刘颖, 周兵, 吴玉程, 于盛旺, 吴艳霞
Effects of different gas flow ratio on structure and tribological properties of Cu/a-C∶H films
Meng Jie, Tian Linhai, Liu Ying, Zhou Bing, Wu Yucheng, Yu Shengwang, Wu Yanxia
金属热处理
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2021, (2): 100
-104
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DOI: 10.13251/j.issn.0254-6051.2021.02.017