工作压强对PECVD法制备DLC薄膜微观结构与力学性能的影响
李瑞武1，周艳文1，李建伟1，范 巍2，郭媛媛1，吴法宇1
Effect of deposition pressure on microstructure and mechanical properties of pulse-PECVD prepared DLC films
Li Ruiwu, Zhou Yanwen, Li Jianwei, Fan Wei, Guo Yuanyuan, Wu Fayu
金属热处理
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2019, (1): 162
-167
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DOI: 10.13251/j.issn.0254-6051.2019.01.035