Effect of bias voltage on structure and properties of DLC film prepared by HiPIMS
Wu Yong, Liu Shuyang, Chen Hui, Tao Guanyu, Du Jianrong, Zhang Yu
Heat Treatment of Metals . 2025, (5): 228 -235 .  DOI: 10.13251/j.issn.0254-6051.2025.05.035